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Method for the Hydrogenation of poly-Si
Qi Wang (Inventor)
National Wind Technology Center
Research output
:
Patent
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Dive into the research topics of 'Method for the Hydrogenation of poly-Si'. Together they form a unique fingerprint.
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Engineering
Polysilicon
100%
Hydrogenation
100%
Atomic Hydrogen
40%
Surface Density
20%
Si Surface
10%
Torr
10%
Heating Time
10%
Base Pressure
10%
Electrical Power
10%
Material Science
Density
100%
Hydrogenation
100%
Surface (Surface Science)
100%