Abstract
Methods for forming CIGS films are provided. According to an aspect of the invention, a method of forming a CIGS film includes a precursor step, which includes simultaneously evaporating Cu, In, Ga, Se, and Sb onto a substrate. The Se is incident on the substrate at a rate of at least 20 A/s. The method also includes a selenization step, which includes evaporating Se over the substrate after the precursor step.
Original language | American English |
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Patent number | 9,768,015 B2 |
Filing date | 19/09/17 |
State | Published - 2017 |
NREL Publication Number
- NREL/PT-5K00-70407
Keywords
- CIGS
- Cu
- films
- Ga
- In
- Sb
- Se
- solar
- substrate