Abstract
Methods of forming interdigitated back contact (IBC) layers are provided. According to an aspect of the invention, a first layer having alternating regions of n-type amorphous hydrogenated silicon and p-type amorphous hydrogenated silicon is formed on a second layer of intrinsic amorphous hydrogenated silicon. The first layer and the second layer are then annealed, such that dopants from the first layer diffuse into the second layer, and the first layer and the second layer crystallize into polysilicon.
Original language | American English |
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Patent number | 10,714,652 B2 |
Filing date | 14/07/20 |
State | Published - 2020 |
NREL Publication Number
- NREL/PT-5900-77393
Keywords
- IBC
- interdigitated back contact layers
- n-type amorphous hydrogenated silicon
- p-type amorphous hydrogenated silicon