Methods of Producing Free-Standing Semiconductors using Sacrificial Buffer Layers and Recyclable Substrates

Aaron Ptak (Inventor), Kirstin Alberi (Inventor), Andrew Norman (Inventor), Yong Lin (Inventor)

Research output: Patent

Abstract

A method of producing semiconductor materials and devices that incorporate the semiconductor materials are provided. In particular, a method is provided of producing a semiconductor material, such as a III-V semiconductor, on a spinel substrate using a sacrificial buffer layer, and devices such as photovoltaic cells that incorporate the semiconductor materials. The sacrificial buffer material and semiconductor materials may be deposited using lattice-matching epitaxy or coincident site lattice-matching epitaxy, resulting in a close degree of lattice matching between the substrate material and deposited material for a wide variety of material compositions. The sacrificial buffer layer may be dissolved using an epitaxial liftoff technique in order to separate the semiconductor device from the spinel substrate, and the spinel substrate may be reused in the subsequent fabrication of other semiconductor devices. The low-defect density semiconductor materials produced using this method result in the enhanced performance of the semiconductor devices that incorporate the semiconductor materials.
Original languageAmerican English
Patent number9,041,027 B2
Filing date26/05/15
StatePublished - 2015

NREL Publication Number

  • NREL/PT-5J00-65236

Fingerprint

Dive into the research topics of 'Methods of Producing Free-Standing Semiconductors using Sacrificial Buffer Layers and Recyclable Substrates'. Together they form a unique fingerprint.

Cite this