Microcrystalline Silicon by DC Magnetron Sputtering: Growth Mechanisms

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Number of pages6
    StatePublished - 1993
    EventMaterials Research Society Symposium - Boston, Massachusetts
    Duration: 30 Nov 19924 Dec 1992


    ConferenceMaterials Research Society Symposium
    CityBoston, Massachusetts

    Bibliographical note

    Work performed by Coordinated Science Laboratory and Department of Materials Science and Engineering, University of Illinois, Urbana, Illinois

    NREL Publication Number

    • ACNR/CP-14593

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