Microcrystalline Silicon by DC Magnetron Sputtering: Growth Mechanisms

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Pages501-506
    Number of pages6
    StatePublished - 1993
    EventMaterials Research Society Symposium - Boston, Massachusetts
    Duration: 30 Nov 19924 Dec 1992

    Conference

    ConferenceMaterials Research Society Symposium
    CityBoston, Massachusetts
    Period30/11/924/12/92

    Bibliographical note

    Work performed by Coordinated Science Laboratory and Department of Materials Science and Engineering, University of Illinois, Urbana, Illinois

    NREL Publication Number

    • ACNR/CP-14593

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