Microcrystalline Silicon by DC Magnetron Sputtering: Growth Mechanisms

Microcrystalline Silicon by DC Magnetron Sputtering: Growth Mechanisms

Research output: Contribution to conference › Paper

Original language	American English
Pages	501-506
Number of pages	6
State	Published - 1993
Event	Materials Research Society Symposium - Boston, Massachusetts Duration: 30 Nov 1992 → 4 Dec 1992

Conference

Conference	Materials Research Society Symposium
City	Boston, Massachusetts
Period	30/11/92 → 4/12/92

Bibliographical note

Work performed by Coordinated Science Laboratory and Department of Materials Science and Engineering, University of Illinois, Urbana, Illinois

NREL Publication Number

ACNR/CP-14593

Cite this

@conference{5997927ea058425d978d12f6a0258311,

title = "Microcrystalline Silicon by DC Magnetron Sputtering: Growth Mechanisms",

author = "NREL",

note = "Work performed by Coordinated Science Laboratory and Department of Materials Science and Engineering, University of Illinois, Urbana, Illinois; Materials Research Society Symposium ; Conference date: 30-11-1992 Through 04-12-1992",

year = "1993",

language = "American English",

pages = "501--506",

}

TY - CONF

T1 - Microcrystalline Silicon by DC Magnetron Sputtering: Growth Mechanisms

AU - NREL, null

N1 - Work performed by Coordinated Science Laboratory and Department of Materials Science and Engineering, University of Illinois, Urbana, Illinois

PY - 1993

Y1 - 1993

M3 - Paper

SP - 501

EP - 506

T2 - Materials Research Society Symposium

Y2 - 30 November 1992 through 4 December 1992

ER -