Microcrystalline Silicon for Solar Cells at High Deposition Rates by Hot Wire CVD

Research output: Contribution to conference › Paper

Original language	American English
Pages	623-628
Number of pages	6
State	Published - 2002
Event	Amorphous and Heterogeneous Silicon-Based Films 2002: Materials Research Society Symposium - San Francisco, California Duration: 2 Apr 2002 → 5 Apr 2002

Conference	Amorphous and Heterogeneous Silicon-Based Films 2002: Materials Research Society Symposium
City	San Francisco, California
Period	2/04/02 → 5/04/02

NREL Publication Number

@conference{41773932e94349b989ab47685a05c00e,

title = "Microcrystalline Silicon for Solar Cells at High Deposition Rates by Hot Wire CVD",

author = "NREL",

year = "2002",

language = "American English",

pages = "623--628",

note = "Amorphous and Heterogeneous Silicon-Based Films 2002: Materials Research Society Symposium ; Conference date: 02-04-2002 Through 05-04-2002",

}