Microcrystalline Silicon for Solar Cells at High Deposition Rates by Hot Wire CVD

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages623-628
Number of pages6
StatePublished - 2002
EventAmorphous and Heterogeneous Silicon-Based Films 2002: Materials Research Society Symposium - San Francisco, California
Duration: 2 Apr 20025 Apr 2002

Conference

ConferenceAmorphous and Heterogeneous Silicon-Based Films 2002: Materials Research Society Symposium
CitySan Francisco, California
Period2/04/025/04/02

NREL Publication Number

  • NREL/CP-520-34221

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