Microcrystalline Silicon for Solar Cells Deposited at High Rates by Hot-Wire CVD

Research output: Contribution to journal › Article › peer-review

NREL Publication Number

@article{404ca78858c54f3ea555fac1c2f2c850,

title = "Microcrystalline Silicon for Solar Cells Deposited at High Rates by Hot-Wire CVD",

author = "NREL",

year = "2003",

doi = "10.1016/S0040-6090(03)00113-5",

language = "American English",

volume = "430",

pages = "212--215",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}