Original language | American English |
---|---|
Pages (from-to) | 1608-1613 |
Number of pages | 6 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 12 |
Issue number | 4 |
DOIs | |
State | Published - 1994 |
NREL Publication Number
- ACNR/JA-15551
Research output: Contribution to journal › Article
Original language | American English |
---|---|
Pages (from-to) | 1608-1613 |
Number of pages | 6 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 12 |
Issue number | 4 |
DOIs | |
State | Published - 1994 |