Migration of Hydrogen in Silicon from PECVD SiNx Films

Research output: Contribution to conference › Paper

Original language	American English
Pages	194-198
Number of pages	5
State	Published - 2008
Event	18th Workshop on Crystalline Silicon Solar Cells and Modules: Materials and Processes - 3-6 August 2008, in Vail, Colorado Duration: 3 Aug 2008 → 6 Aug 2008

Conference	18th Workshop on Crystalline Silicon Solar Cells and Modules: Materials and Processes
City	3-6 August 2008, in Vail, Colorado
Period	3/08/08 → 6/08/08

NREL Publication Number

@conference{34f8dc72405e43d886c4350c9c13ac8d,

title = "Migration of Hydrogen in Silicon from PECVD SiNx Films",

keywords = "hydrogen, thin films",

author = "NREL",

year = "2008",

language = "American English",

pages = "194--198",

note = "18th Workshop on Crystalline Silicon Solar Cells and Modules: Materials and Processes ; Conference date: 03-08-2008 Through 06-08-2008",

}