Abstract
Ferroelectric loaded line phase shifters operating at millimeter waves for phased array antenna applications are presented. Phase shifters were manufactured on using Ba 0.3Sr 0.7TiO 3 thin films. The magnetron sputtering process was used to fabricate these Ba 0.3Sr 0.7TiO 3 ferroelectric films with a thickness ∼1 μm. The phase shifter operating at V-band (60 GHz) demonstrated continuous phase shift up to 220 deg and figure of merit (FOM) 22 deg/dB. The phase shifter operating at Ka-band (30 GHz) showed phase shift up to 360 deg and FOM 40 deg/dB.
Original language | American English |
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Pages (from-to) | 847-852 |
Number of pages | 6 |
Journal | Integrated Ferroelectrics |
Volume | 55 |
Issue number | 1 |
DOIs | |
State | Published - 2003 |
NREL Publication Number
- NREL/JA-520-36764
Keywords
- Ferroelectric thin films
- Microwave devices
- Phase shifters
- Tunable