| Original language | American English |
|---|---|
| Pages (from-to) | 990-995 |
| Number of pages | 6 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 10 |
| Issue number | 4 |
| DOIs | |
| State | Published - 1992 |
NLR Publication Number
- NREL/JA-213-4614
Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver