Modeling and Measurement of Film Deposition in a One-Dimensional Hot-Wire CVD System

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Pages (from-to)28-32
Number of pages5
JournalThin Solid Films
Volume430
DOIs
StatePublished - 2003

NREL Publication Number

  • NREL/JA-520-35032

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