Modeling and Measurement of Film Deposition in a One-Dimensional Hot-Wire CVD System

Research output: Contribution to journal › Article › peer-review

NREL Publication Number

@article{64f3485c0f52427682c1a119492cfcf6,

title = "Modeling and Measurement of Film Deposition in a One-Dimensional Hot-Wire CVD System",

author = "NREL",

year = "2003",

doi = "10.1016/S0040-6090(03)00126-3",

language = "American English",

volume = "430",

pages = "28--32",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}