Modeling and Measurement of Film Deposition in a One-Dimensional Hot-Wire CVD System

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NLR Publication Number

@article{64f3485c0f52427682c1a119492cfcf6,

title = "Modeling and Measurement of Film Deposition in a One-Dimensional Hot-Wire CVD System",

author = "NREL",

year = "2003",

doi = "10.1016/S0040-6090(03)00126-3",

language = "American English",

volume = "430",

pages = "28--32",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}