Modeling of Void Nucleation and Growth in Silicon

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Pages170-173
    Number of pages4
    StatePublished - 1997
    EventSeventh Workshop on the Role of Impurities and Defects in Silicon Device Processing - Vail, Colorado
    Duration: 11 Aug 199713 Aug 1997

    Conference

    ConferenceSeventh Workshop on the Role of Impurities and Defects in Silicon Device Processing
    CityVail, Colorado
    Period11/08/9713/08/97

    Bibliographical note

    Work performed by Duke University, Durham, North Carolina

    NREL Publication Number

    • NREL/CP-23613

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