Molybdenum-Doped Indium Oxide Deposited by Radio-Frequency Magnetron Sputtering and Pulsed Laser Deposition

Y. Yoshida; C. Warmsingh; T. A. Gessert; D. L. Young; D. M. Wood; J. D. Perkins; D. S. Ginley; T. J. Coutts

Molybdenum-Doped Indium Oxide Deposited by Radio-Frequency Magnetron Sputtering and Pulsed Laser Deposition

Y. Yoshida, C. Warmsingh, T. A. Gessert, D. L. Young, D. M. Wood, J. D. Perkins, D. S. Ginley, T. J. Coutts

Research output: Contribution to conference › Paper › peer-review

2 Scopus Citations

Abstract

Thin-films of molybdenum-doped indium oxide (IMO), an n-type transparent conducting oxide, were deposited using radio-frequency (RF) magnetron sputtering and pulsed laser deposition (PLD). To date, sputtered and PLD IMO films have exhibited mobilities as high as 45 and 127 cm²V^- ¹s^-1. Temperature-dependent Hall measurements were done on both sputtered and PLD films to study scattering mechanisms. In addition, four transport coefficient measurements (conductivity, Hall, Nerst, and Seebeck coefficients) were conducted to extract the transport properties of IMO. Temperature-dependent Hall measurements on PLD and sputtered films suggest the mobility is limited by phonon and ionized impurity scattering, respectively. From the method of four coefficients, the density-of-states effective-mass value of IMO was found to increase from ∼0.25m_e to ∼0.4m _eas carrier concentration varied from 3.6×10¹⁹ to 6.5×10²⁰ cm^-3.

Original language	American English
Pages	34-37
Number of pages	4
State	Published - 2003
Event	3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3): Joint Conference of 13th PV Science and Engineering Conference, 30th IEEE PV Specialists Conference, and 18th European PV Solar Energy Conference - Osaka, Japan Duration: 11 May 2003 → 18 May 2003

Conference

Conference	3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3): Joint Conference of 13th PV Science and Engineering Conference, 30th IEEE PV Specialists Conference, and 18th European PV Solar Energy Conference
City	Osaka, Japan
Period	11/05/03 → 18/05/03

NREL Publication Number

NREL/CP-520-34051

Cite this

Yoshida, Y., Warmsingh, C., Gessert, T. A., Young, D. L., Wood, D. M., Perkins, J. D., Ginley, D. S., & Coutts, T. J. (2003). Molybdenum-Doped Indium Oxide Deposited by Radio-Frequency Magnetron Sputtering and Pulsed Laser Deposition. 34-37. Paper presented at 3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3): Joint Conference of 13th PV Science and Engineering Conference, 30th IEEE PV Specialists Conference, and 18th European PV Solar Energy Conference, Osaka, Japan.

Yoshida, Y. ; Warmsingh, C. ; Gessert, T. A. et al. / Molybdenum-Doped Indium Oxide Deposited by Radio-Frequency Magnetron Sputtering and Pulsed Laser Deposition. Paper presented at 3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3): Joint Conference of 13th PV Science and Engineering Conference, 30th IEEE PV Specialists Conference, and 18th European PV Solar Energy Conference, Osaka, Japan.4 p.

@conference{93e2bf412f1940f6b660ac27bb3660b8,

title = "Molybdenum-Doped Indium Oxide Deposited by Radio-Frequency Magnetron Sputtering and Pulsed Laser Deposition",

abstract = "Thin-films of molybdenum-doped indium oxide (IMO), an n-type transparent conducting oxide, were deposited using radio-frequency (RF) magnetron sputtering and pulsed laser deposition (PLD). To date, sputtered and PLD IMO films have exhibited mobilities as high as 45 and 127 cm2V- 1s-1. Temperature-dependent Hall measurements were done on both sputtered and PLD films to study scattering mechanisms. In addition, four transport coefficient measurements (conductivity, Hall, Nerst, and Seebeck coefficients) were conducted to extract the transport properties of IMO. Temperature-dependent Hall measurements on PLD and sputtered films suggest the mobility is limited by phonon and ionized impurity scattering, respectively. From the method of four coefficients, the density-of-states effective-mass value of IMO was found to increase from ∼0.25me to ∼0.4m eas carrier concentration varied from 3.6×1019 to 6.5×1020 cm-3.",

author = "Y. Yoshida and C. Warmsingh and Gessert, \{T. A.\} and Young, \{D. L.\} and Wood, \{D. M.\} and Perkins, \{J. D.\} and Ginley, \{D. S.\} and Coutts, \{T. J.\}",

year = "2003",

language = "American English",

pages = "34--37",

note = "3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3): Joint Conference of 13th PV Science and Engineering Conference, 30th IEEE PV Specialists Conference, and 18th European PV Solar Energy Conference ; Conference date: 11-05-2003 Through 18-05-2003",

}

Yoshida, Y, Warmsingh, C, Gessert, TA, Young, DL, Wood, DM, Perkins, JD, Ginley, DS & Coutts, TJ 2003, 'Molybdenum-Doped Indium Oxide Deposited by Radio-Frequency Magnetron Sputtering and Pulsed Laser Deposition', Paper presented at 3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3): Joint Conference of 13th PV Science and Engineering Conference, 30th IEEE PV Specialists Conference, and 18th European PV Solar Energy Conference, Osaka, Japan, 11/05/03 - 18/05/03 pp. 34-37.

Molybdenum-Doped Indium Oxide Deposited by Radio-Frequency Magnetron Sputtering and Pulsed Laser Deposition. / Yoshida, Y.; Warmsingh, C.; Gessert, T. A. et al.
2003. 34-37 Paper presented at 3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3): Joint Conference of 13th PV Science and Engineering Conference, 30th IEEE PV Specialists Conference, and 18th European PV Solar Energy Conference, Osaka, Japan.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Molybdenum-Doped Indium Oxide Deposited by Radio-Frequency Magnetron Sputtering and Pulsed Laser Deposition

AU - Yoshida, Y.

AU - Warmsingh, C.

AU - Gessert, T. A.

AU - Young, D. L.

AU - Wood, D. M.

AU - Perkins, J. D.

AU - Ginley, D. S.

AU - Coutts, T. J.

PY - 2003

Y1 - 2003

N2 - Thin-films of molybdenum-doped indium oxide (IMO), an n-type transparent conducting oxide, were deposited using radio-frequency (RF) magnetron sputtering and pulsed laser deposition (PLD). To date, sputtered and PLD IMO films have exhibited mobilities as high as 45 and 127 cm2V- 1s-1. Temperature-dependent Hall measurements were done on both sputtered and PLD films to study scattering mechanisms. In addition, four transport coefficient measurements (conductivity, Hall, Nerst, and Seebeck coefficients) were conducted to extract the transport properties of IMO. Temperature-dependent Hall measurements on PLD and sputtered films suggest the mobility is limited by phonon and ionized impurity scattering, respectively. From the method of four coefficients, the density-of-states effective-mass value of IMO was found to increase from ∼0.25me to ∼0.4m eas carrier concentration varied from 3.6×1019 to 6.5×1020 cm-3.

AB - Thin-films of molybdenum-doped indium oxide (IMO), an n-type transparent conducting oxide, were deposited using radio-frequency (RF) magnetron sputtering and pulsed laser deposition (PLD). To date, sputtered and PLD IMO films have exhibited mobilities as high as 45 and 127 cm2V- 1s-1. Temperature-dependent Hall measurements were done on both sputtered and PLD films to study scattering mechanisms. In addition, four transport coefficient measurements (conductivity, Hall, Nerst, and Seebeck coefficients) were conducted to extract the transport properties of IMO. Temperature-dependent Hall measurements on PLD and sputtered films suggest the mobility is limited by phonon and ionized impurity scattering, respectively. From the method of four coefficients, the density-of-states effective-mass value of IMO was found to increase from ∼0.25me to ∼0.4m eas carrier concentration varied from 3.6×1019 to 6.5×1020 cm-3.

UR - http://www.scopus.com/inward/record.url?scp=6344253121&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:6344253121

SP - 34

EP - 37

T2 - 3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3): Joint Conference of 13th PV Science and Engineering Conference, 30th IEEE PV Specialists Conference, and 18th European PV Solar Energy Conference

Y2 - 11 May 2003 through 18 May 2003

ER -

Yoshida Y, Warmsingh C, Gessert TA, Young DL, Wood DM, Perkins JD et al.. Molybdenum-Doped Indium Oxide Deposited by Radio-Frequency Magnetron Sputtering and Pulsed Laser Deposition. 2003. Paper presented at 3rd World Conference on Photovoltaic Energy Conversion (WCPEC-3): Joint Conference of 13th PV Science and Engineering Conference, 30th IEEE PV Specialists Conference, and 18th European PV Solar Energy Conference, Osaka, Japan.

Molybdenum-Doped Indium Oxide Deposited by Radio-Frequency Magnetron Sputtering and Pulsed Laser Deposition

Abstract

Conference

NREL Publication Number

Other files and links

Fingerprint

Cite this