Monitoring and Modeling Silicon Homoepitaxy Breakdown with Real-Time Spectroscopic Ellipsometry: Article No. 103536

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Number of pages7
JournalJournal of Applied Physics
Volume97
Issue number10
DOIs
StatePublished - 2005

NREL Publication Number

  • NREL/JA-520-38424

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