Multilayer Heterostructures and Their Manufacture

Scott Hammond (Inventor), Matthew Reese (Inventor), Calvin Curtis (Inventor), Dana Olson (Inventor), David Ginley (Inventor), Benjamin Rupert (Inventor), Alexander Miedaner (Inventor)

Research output: Patent


A method of synthesizing multilayer heterostructures including an inorganic oxide layer residing on a solid substrate is described. Exemplary embodiments include producing an inorganic oxide layer on a solid substrate by a liquid coating process under relatively mild conditions. The relatively mild conditions include temperatures below C. and pressures above 9.4 mb. In an exemplary embodiment, a solution of diethyl aluminum ethoxide in anhydrous diglyme is applied to a flexible solid substrate by slot-die coating at ambient atmospheric pressure, and the diglyme removed by evaporation. An AlO.sub.x layer is formed by subjecting material remaining on the solid substrate to a relatively mild oven temperature of approximately C. The resulting AlO.sub.x layer exhibits relatively high light transmittance and relatively low vapor transmission rates for water. An exemplary embodiment of a flexible solid substrate is polyethylene napthalate (PEN). The PEN is not substantially adversely affected by exposure to C.
Original languageAmerican English
Patent number9,175,397
Filing date3/11/15
StatePublished - 2015

NREL Publication Number

  • NREL/PT-5900-65876


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