Original language | American English |
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Pages (from-to) | 2441-2448 |
Number of pages | 8 |
Journal | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics |
Volume | 20 |
Issue number | 6 |
DOIs | |
State | Published - 2002 |
NREL Publication Number
- NREL/JA-520-33866