| Original language | American English |
|---|---|
| Pages (from-to) | 2441-2448 |
| Number of pages | 8 |
| Journal | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics |
| Volume | 20 |
| Issue number | 6 |
| DOIs | |
| State | Published - 2002 |
NLR Publication Number
- NREL/JA-520-33866