Neutral Radical Deposition from Silane Discharges

Research output: Contribution to journal › Article

Work performed by Joint Institute for Laboratory Astrophysics, National Bureau of Standards and University of Colorado, Boulder, Colorado

NLR Publication Number

@article{bbfe89911bb94051aa7caf6478b267c4,

title = "Neutral Radical Deposition from Silane Discharges",

author = "NREL",

note = "Work performed by Joint Institute for Laboratory Astrophysics, National Bureau of Standards and University of Colorado, Boulder, Colorado",

year = "1988",

doi = "10.1063/1.341034",

language = "American English",

volume = "63",

pages = "2406--2413",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "7",

}

TY - JOUR

T1 - Neutral Radical Deposition from Silane Discharges

AU - NREL, null

N1 - Work performed by Joint Institute for Laboratory Astrophysics, National Bureau of Standards and University of Colorado, Boulder, Colorado

PY - 1988

Y1 - 1988

U2 - 10.1063/1.341034

DO - 10.1063/1.341034

M3 - Article

SN - 0021-8979

VL - 63

SP - 2406

EP - 2413

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 7

ER -