Non-Vacuum and PLD Growth of Next Generation TCO Materials

David Ginley, B. Roy, Aiko Ode, C. Warmsingh, Y. Yoshida, Philip Parilla, Charles Teplin, Tanya Kaydanova, Alex Miedaner, Calvin Curtis, Alex Martinson, Tim Coutts, Dennis Readey, Hideo Hosono, John Perkins

Research output: Contribution to journalArticlepeer-review

62 Scopus Citations

Abstract

Transparent conducting oxides represent a key component in a number of important opto-electronic technologies. The demand for improved materials is increasing. It is increasingly important to develop improved materials and process techniques. We report on the PLD growth of both Mo doped In-O, an n-type material with enhanced mobilities, and p-type Ca-CuInO2 films with improved conductivity. In both cases, very high quality films have been obtained with improved opto-electronic properties. We also report on a solution based route to p-type Cu2SrO2 which has produced phase pure films.

Original languageAmerican English
Pages (from-to)193-198
Number of pages6
JournalThin Solid Films
Volume445
Issue number2
DOIs
StatePublished - 2003
EventProceedings of the 3rd International Symposium on Transparent Oxide - Tokyo, Japan
Duration: 10 Apr 200311 Apr 2003

NREL Publication Number

  • NREL/JA-520-35931

Keywords

  • Conductivity
  • Copper oxide
  • Indium oxide
  • Laser ablation
  • Oxides
  • Solar cells

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