Nucleation of p-Type Microcrystalline Silicon on Amorphous Silicon for n-i-p Solar Cells Using B(CH3)3 and BF3 Dopant Source Gases

Nucleation of p-Type Microcrystalline Silicon on Amorphous Silicon for n-i-p Solar Cells Using B(CH3)3 and BF3 Dopant Source Gases

Research output: Contribution to conference › Paper

Original language	American English
Pages	873-878
Number of pages	6
State	Published - 1999
Event	Amorphous and Microcrystalline Silicon Technology 1998: Materials Research Society Symposium - San Francisco, California Duration: 14 Apr 1998 → 17 Apr 1998

Conference

Conference	Amorphous and Microcrystalline Silicon Technology 1998: Materials Research Society Symposium
City	San Francisco, California
Period	14/04/98 → 17/04/98

Bibliographical note

Work performed by Pennsylvania State University, University Park, Pennsylvania

NREL Publication Number

NREL/CP-520-27276

Cite this

@conference{000cd2cae3324b009adbbfa88c250e78,

title = "Nucleation of p-Type Microcrystalline Silicon on Amorphous Silicon for n-i-p Solar Cells Using B(CH3)3 and BF3 Dopant Source Gases",

author = "NREL",

note = "Work performed by Pennsylvania State University, University Park, Pennsylvania; Amorphous and Microcrystalline Silicon Technology 1998: Materials Research Society Symposium ; Conference date: 14-04-1998 Through 17-04-1998",

year = "1999",

language = "American English",

pages = "873--878",

}

TY - CONF

T1 - Nucleation of p-Type Microcrystalline Silicon on Amorphous Silicon for n-i-p Solar Cells Using B(CH3)3 and BF3 Dopant Source Gases

AU - NREL, null

N1 - Work performed by Pennsylvania State University, University Park, Pennsylvania

PY - 1999

Y1 - 1999

M3 - Paper

SP - 873

EP - 878

T2 - Amorphous and Microcrystalline Silicon Technology 1998: Materials Research Society Symposium

Y2 - 14 April 1998 through 17 April 1998

ER -