Optical Analysis of Thin Film Combinatorial Libraries

J. D. Perkins; C. W. Teplin; M. F.A.M. Van Hest; J. L. Alleman; X. Li; M. S. Dabney; B. M. Keyes; L. M. Gedvilas; D. S. Ginley; Y. Lin; Y. Lu

doi:10.1016/S0169-4332(03)00917-6

Optical Analysis of Thin Film Combinatorial Libraries

J. D. Perkins, C. W. Teplin, M. F.A.M. Van Hest, J. L. Alleman, X. Li, M. S. Dabney, B. M. Keyes, L. M. Gedvilas, D. S. Ginley, Y. Lin, Y. Lu

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Abstract

We have developed, and are using, optical reflection and transmission mapping as a characterization tool for analyzing compositionally graded thin film combinatorial libraries. Measurements cover the spectral range of 200nm to 25μm. For the UV-Vis-NIR region, a multichannel fiber optically coupled CCD array-based spectrometer is used for simultaneous reflection and transmission mapping. For the IR, a Fourier transform infrared (FTIR) spectrometer is used for sequential reflection and transmission maps. Depending upon the type of library being analyzed, the measured spectra can, with appropriate modeling, be analyzed for the optical band gap, film thickness, index of refraction, plasma frequency, conductivity, carrier scattering time and color, in addition to simple reflectance and transmittance. We discuss these techniques using examples taken from our work on both transparent conducting oxides and metal nitrides for optical coatings.

Original language	American English
Pages (from-to)	124-132
Number of pages	9
Journal	Applied Surface Science
Volume	223
Issue number	1-3
DOIs	https://doi.org/10.1016/S0169-4332(03)00917-6 https://doi.org/10.1016/S0169-4332(03)00917-6
State	Published - 2004

NREL Publication Number

NREL/JA-520-35935

Keywords

Optical coatings
Thin film combinatorial libraries
Transparent conducting oxide (TCO)

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@article{16526b4255c249e9a50035e254e7cc53,

title = "Optical Analysis of Thin Film Combinatorial Libraries",

abstract = "We have developed, and are using, optical reflection and transmission mapping as a characterization tool for analyzing compositionally graded thin film combinatorial libraries. Measurements cover the spectral range of 200nm to 25μm. For the UV-Vis-NIR region, a multichannel fiber optically coupled CCD array-based spectrometer is used for simultaneous reflection and transmission mapping. For the IR, a Fourier transform infrared (FTIR) spectrometer is used for sequential reflection and transmission maps. Depending upon the type of library being analyzed, the measured spectra can, with appropriate modeling, be analyzed for the optical band gap, film thickness, index of refraction, plasma frequency, conductivity, carrier scattering time and color, in addition to simple reflectance and transmittance. We discuss these techniques using examples taken from our work on both transparent conducting oxides and metal nitrides for optical coatings.",

keywords = "Optical coatings, Thin film combinatorial libraries, Transparent conducting oxide (TCO)",

author = "Perkins, {J. D.} and Teplin, {C. W.} and {Van Hest}, {M. F.A.M.} and Alleman, {J. L.} and X. Li and Dabney, {M. S.} and Keyes, {B. M.} and Gedvilas, {L. M.} and Ginley, {D. S.} and Y. Lin and Y. Lu",

year = "2004",

doi = "10.1016/S0169-4332(03)00917-6",

language = "American English",

volume = "223",

pages = "124--132",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier B.V.",

number = "1-3",

}

TY - JOUR

T1 - Optical Analysis of Thin Film Combinatorial Libraries

AU - Perkins, J. D.

AU - Teplin, C. W.

AU - Van Hest, M. F.A.M.

AU - Alleman, J. L.

AU - Li, X.

AU - Dabney, M. S.

AU - Keyes, B. M.

AU - Gedvilas, L. M.

AU - Ginley, D. S.

AU - Lin, Y.

AU - Lu, Y.

PY - 2004

Y1 - 2004

N2 - We have developed, and are using, optical reflection and transmission mapping as a characterization tool for analyzing compositionally graded thin film combinatorial libraries. Measurements cover the spectral range of 200nm to 25μm. For the UV-Vis-NIR region, a multichannel fiber optically coupled CCD array-based spectrometer is used for simultaneous reflection and transmission mapping. For the IR, a Fourier transform infrared (FTIR) spectrometer is used for sequential reflection and transmission maps. Depending upon the type of library being analyzed, the measured spectra can, with appropriate modeling, be analyzed for the optical band gap, film thickness, index of refraction, plasma frequency, conductivity, carrier scattering time and color, in addition to simple reflectance and transmittance. We discuss these techniques using examples taken from our work on both transparent conducting oxides and metal nitrides for optical coatings.

AB - We have developed, and are using, optical reflection and transmission mapping as a characterization tool for analyzing compositionally graded thin film combinatorial libraries. Measurements cover the spectral range of 200nm to 25μm. For the UV-Vis-NIR region, a multichannel fiber optically coupled CCD array-based spectrometer is used for simultaneous reflection and transmission mapping. For the IR, a Fourier transform infrared (FTIR) spectrometer is used for sequential reflection and transmission maps. Depending upon the type of library being analyzed, the measured spectra can, with appropriate modeling, be analyzed for the optical band gap, film thickness, index of refraction, plasma frequency, conductivity, carrier scattering time and color, in addition to simple reflectance and transmittance. We discuss these techniques using examples taken from our work on both transparent conducting oxides and metal nitrides for optical coatings.

KW - Optical coatings

KW - Thin film combinatorial libraries

KW - Transparent conducting oxide (TCO)

UR - http://www.scopus.com/inward/record.url?scp=0346304815&partnerID=8YFLogxK

U2 - 10.1016/S0169-4332(03)00917-6

DO - 10.1016/S0169-4332(03)00917-6

M3 - Article

AN - SCOPUS:0346304815

SN - 0169-4332

VL - 223

SP - 124

EP - 132

JO - Applied Surface Science

JF - Applied Surface Science

IS - 1-3

ER -

Optical Analysis of Thin Film Combinatorial Libraries

Abstract

NREL Publication Number

Keywords

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