@article{9749ff45010641efa8cb6fb28251f072,
title = "Optical and Electrical Properties of a-Si:H Films Grown by Remote Plasma Enhanced Chemical Vapor Deposition (RPECVD)",
author = "NREL",
note = "Work performed by Department of Physics, North Carolina State University, Raleigh, North Carolina",
year = "1987",
doi = "10.1016/0022-3093(87)90329-2",
language = "American English",
volume = "97 & 98, Part II",
pages = "1375--1378",
journal = "Journal of Non-Crystalline Solids",
issn = "0022-3093",
publisher = "Elsevier B.V.",
}