Optical Control of Multi-Stage Thin Film Solar Cell Production

Dean Levi (Inventor), Miguel Contreras (Inventor)

Research output: Patent


Embodiments include methods of depositing and controlling the deposition of a film in multiple stages. The disclosed deposition and deposition control methods include the optical monitoring of a deposition matrix to determine a time when at least one transition point occurs. In certain embodiments, the transition point or transition points are a stoichiometry point. Methods may also include controlling the length of time in which material is deposited during a deposition stage or controlling the amount of the first, second or subsequent materials deposited during any deposition stage in response to a determination of the time when a selected transition point occurs.
Original languageAmerican English
Patent number9,343,378 B2
Filing date17/05/16
StatePublished - 2016

NREL Publication Number

  • NREL/PT-5J00-66910


  • deposition
  • thin film solar cells


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