Abstract
Embodiments include methods of depositing and controlling the deposition of a film in multiple stages. The disclosed deposition and deposition control methods include the optical monitoring of a deposition matrix to determine a time when at least one transition point occurs. In certain embodiments, the transition point or transition points are a stoichiometry point. Methods may also include controlling the length of time in which material is deposited during a deposition stage or controlling the amount of the first, second or subsequent materials deposited during any deposition stage in response to a determination of the time when a selected transition point occurs.
Original language | American English |
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Patent number | 9,343,378 B2 |
Filing date | 17/05/16 |
State | Published - 2016 |
NREL Publication Number
- NREL/PT-5J00-66910
Keywords
- deposition
- thin film solar cells