Optical Determination of the Mass Density of Amorphous and Microcrystalline Silicon Layers with Different Hydrogen Contents

Research output: Contribution to journal › Article › peer-review

Original language	American English
Pages (from-to)	876-879
Number of pages	4
Journal	Journal of Non-Crystalline Solids
Volume	227-230
DOIs	https://doi.org/10.1016/S0022-3093(98)00207-5
State	Published - 1998

NLR Publication Number

@article{00ef5da7b5064277b574d7b852f27c1c,

title = "Optical Determination of the Mass Density of Amorphous and Microcrystalline Silicon Layers with Different Hydrogen Contents",

author = "NREL",

year = "1998",

doi = "10.1016/S0022-3093(98)00207-5",

language = "American English",

volume = "227-230",

pages = "876--879",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Optical Determination of the Mass Density of Amorphous and Microcrystalline Silicon Layers with Different Hydrogen Contents

AU - NREL, null

PY - 1998

Y1 - 1998

U2 - 10.1016/S0022-3093(98)00207-5

DO - 10.1016/S0022-3093(98)00207-5

M3 - Article

SN - 0022-3093

VL - 227-230

SP - 876

EP - 879

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

ER -