Optical Emission and Mass Spectrometric Studies of Plasma Deposition

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)683-686
    Number of pages4
    JournalJournal of Non-Crystalline Solids
    Volume59 & 60, Part II
    StatePublished - 1983

    Bibliographical note

    Work performed by Metallurgy and Materials Science Division, Brookhaven National Laboratory, Upton, New York

    NREL Publication Number

    • ACNR/JA-4203

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