Optical Emission and Mass Spectrometric Studies of Plasma Deposition

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	683-686
Number of pages	4
Journal	Journal of Non-Crystalline Solids
Volume	59 & 60, Part II
DOIs	https://doi.org/10.1016/0022-3093(83)90263-6
State	Published - 1983

Work performed by Metallurgy and Materials Science Division, Brookhaven National Laboratory, Upton, New York

NLR Publication Number

@article{c70573111ee84a3da0715e3cf92f5560,

title = "Optical Emission and Mass Spectrometric Studies of Plasma Deposition",

author = "NREL",

note = "Work performed by Metallurgy and Materials Science Division, Brookhaven National Laboratory, Upton, New York",

year = "1983",

doi = "10.1016/0022-3093(83)90263-6",

language = "American English",

volume = "59 \& 60, Part II",

pages = "683--686",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Optical Emission and Mass Spectrometric Studies of Plasma Deposition

AU - NREL, null

N1 - Work performed by Metallurgy and Materials Science Division, Brookhaven National Laboratory, Upton, New York

PY - 1983

Y1 - 1983

U2 - 10.1016/0022-3093(83)90263-6

DO - 10.1016/0022-3093(83)90263-6

M3 - Article

SN - 0022-3093

VL - 59 & 60, Part II

SP - 683

EP - 686

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

ER -