Optical Emission Diagnostics of Electron Cyclotron Resonance & Glow Discharge Plasmas for a-Si:H and a-SiC:H Film Depositions

Research output: Contribution to conference › Paper

Original language	American English
Pages	202-206
Number of pages	5
State	Published - 1989
Event	Twentieth IEEE Photovoltaic Specialists Conference - 1988 - Las Vegas, Nevada Duration: 26 Sep 1988 → 30 Sep 1988

Conference	Twentieth IEEE Photovoltaic Specialists Conference - 1988
City	Las Vegas, Nevada
Period	26/09/88 → 30/09/88

NREL Publication Number

@conference{09a37bf8e2b346b5a2785c3ac7d0ab12,

title = "Optical Emission Diagnostics of Electron Cyclotron Resonance & Glow Discharge Plasmas for a-Si:H and a-SiC:H Film Depositions",

author = "NREL",

year = "1989",

language = "American English",

pages = "202--206",

note = "Twentieth IEEE Photovoltaic Specialists Conference - 1988 ; Conference date: 26-09-1988 Through 30-09-1988",

}