Optical Emission Study of the Glow-Discharge Deposition of Hydrogenated Amorphous Silicon from Argon-Silane Mixtures

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)2276-2280
    Number of pages5
    JournalJournal of Applied Physics
    Issue number5
    StatePublished - 1983

    Bibliographical note

    Work performed by Division of Metallurgy and Materials Science, Brookhaven National Laboratory, Upton, New York

    NREL Publication Number

    • ACNR/JA-3934

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