Optimization of Conductivity and Transparency in Amorphous In-Zn-O Transparent Conductors: Preprint

Optimization of Conductivity and Transparency in Amorphous In-Zn-O Transparent Conductors: Preprint

Research output: Contribution to conference › Paper

Abstract

Amorphous mixed metal oxide TCOs are of increasing interest due to the excellent opto-electronic properties and smoothness (RRMS < 0.5 nm) obtained for sputtered films deposited at less than 100 ..deg..C. Here, we have investigated the combined materials phase space of oxygen stoichiometry and metals composition (In:Zn ratio) and made two key discoveries.

Original language	American English
Number of pages	5
State	Published - 2008
Event	33rd IEEE Photovoltaic Specialists Conference - San Diego, California Duration: 11 May 2008 → 16 May 2008

Conference

Conference	33rd IEEE Photovoltaic Specialists Conference
City	San Diego, California
Period	11/05/08 → 16/05/08

NREL Publication Number

NREL/CP-520-42546

Keywords

amorphous silicon
antireflection coatings
chemical barriers
electrical contacts
PV
thin films
transparent conducting oxides (TCO)
X-ray diffraction

Access to Document

https://www.nrel.gov/docs/fy08osti/42546.pdf

Cite this

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title = "Optimization of Conductivity and Transparency in Amorphous In-Zn-O Transparent Conductors: Preprint",

abstract = "Amorphous mixed metal oxide TCOs are of increasing interest due to the excellent opto-electronic properties and smoothness (RRMS < 0.5 nm) obtained for sputtered films deposited at less than 100 ..deg..C. Here, we have investigated the combined materials phase space of oxygen stoichiometry and metals composition (In:Zn ratio) and made two key discoveries.",

keywords = "amorphous silicon, antireflection coatings, chemical barriers, electrical contacts, PV, thin films, transparent conducting oxides (TCO), X-ray diffraction",

author = "NREL",

year = "2008",

language = "American English",

note = "33rd IEEE Photovoltaic Specialists Conference ; Conference date: 11-05-2008 Through 16-05-2008",

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AU - NREL, null

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N2 - Amorphous mixed metal oxide TCOs are of increasing interest due to the excellent opto-electronic properties and smoothness (RRMS < 0.5 nm) obtained for sputtered films deposited at less than 100 ..deg..C. Here, we have investigated the combined materials phase space of oxygen stoichiometry and metals composition (In:Zn ratio) and made two key discoveries.

AB - Amorphous mixed metal oxide TCOs are of increasing interest due to the excellent opto-electronic properties and smoothness (RRMS < 0.5 nm) obtained for sputtered films deposited at less than 100 ..deg..C. Here, we have investigated the combined materials phase space of oxygen stoichiometry and metals composition (In:Zn ratio) and made two key discoveries.

KW - amorphous silicon

KW - antireflection coatings

KW - chemical barriers

KW - electrical contacts

KW - PV

KW - thin films

KW - transparent conducting oxides (TCO)

KW - X-ray diffraction

M3 - Paper

T2 - 33rd IEEE Photovoltaic Specialists Conference

Y2 - 11 May 2008 through 16 May 2008

ER -

Optimization of Conductivity and Transparency in Amorphous In-Zn-O Transparent Conductors: Preprint

Abstract

Conference

NREL Publication Number

Keywords

Access to Document

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Cite this