Optimization of Conductivity and Transparency in Amorphous In-Zn-O Transparent Conductors: Preprint

Joseph Berry; Jeffrey Alleman; Matthew Dabney; Lynn Gedvilas; A. Leenheer; R. O'Hayre

Optimization of Conductivity and Transparency in Amorphous In-Zn-O Transparent Conductors: Preprint

Joseph Berry
, Jeffrey Alleman
, Matthew Dabney
, Lynn Gedvilas
, A. Leenheer
, R. O'Hayre

Research output: Contribution to conference › Paper

Abstract

Amorphous mixed metal oxide TCOs are of increasing interest due to the excellent opto-electronic properties and smoothness (RRMS < 0.5 nm) obtained for sputtered films deposited at less than 100 ..deg..C. Here, we have investigated the combined materials phase space of oxygen stoichiometry and metals composition (In:Zn ratio) and made two key discoveries.

Original language	American English
Number of pages	5
State	Published - 2008
Event	33rd IEEE Photovoltaic Specialists Conference - San Diego, California Duration: 11 May 2008 → 16 May 2008

Conference

Conference	33rd IEEE Photovoltaic Specialists Conference
City	San Diego, California
Period	11/05/08 → 16/05/08

NLR Publication Number

NREL/CP-520-42546

Keywords

amorphous silicon
antireflection coatings
chemical barriers
electrical contacts
PV
thin films
transparent conducting oxides (TCO)
X-ray diffraction

Access to Document

https://www.nrel.gov/docs/fy08osti/42546.pdf

Cite this

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title = "Optimization of Conductivity and Transparency in Amorphous In-Zn-O Transparent Conductors: Preprint",

abstract = "Amorphous mixed metal oxide TCOs are of increasing interest due to the excellent opto-electronic properties and smoothness (RRMS < 0.5 nm) obtained for sputtered films deposited at less than 100 ..deg..C. Here, we have investigated the combined materials phase space of oxygen stoichiometry and metals composition (In:Zn ratio) and made two key discoveries.",

keywords = "amorphous silicon, antireflection coatings, chemical barriers, electrical contacts, PV, thin films, transparent conducting oxides (TCO), X-ray diffraction",

author = "Joseph Berry and Jeffrey Alleman and Matthew Dabney and Lynn Gedvilas and A. Leenheer and R. O'Hayre",

year = "2008",

language = "American English",

note = "33rd IEEE Photovoltaic Specialists Conference ; Conference date: 11-05-2008 Through 16-05-2008",

}

TY - CONF

T1 - Optimization of Conductivity and Transparency in Amorphous In-Zn-O Transparent Conductors: Preprint

AU - Berry, Joseph

AU - Alleman, Jeffrey

AU - Dabney, Matthew

AU - Gedvilas, Lynn

AU - Leenheer, A.

AU - O'Hayre, R.

PY - 2008

Y1 - 2008

N2 - Amorphous mixed metal oxide TCOs are of increasing interest due to the excellent opto-electronic properties and smoothness (RRMS < 0.5 nm) obtained for sputtered films deposited at less than 100 ..deg..C. Here, we have investigated the combined materials phase space of oxygen stoichiometry and metals composition (In:Zn ratio) and made two key discoveries.

AB - Amorphous mixed metal oxide TCOs are of increasing interest due to the excellent opto-electronic properties and smoothness (RRMS < 0.5 nm) obtained for sputtered films deposited at less than 100 ..deg..C. Here, we have investigated the combined materials phase space of oxygen stoichiometry and metals composition (In:Zn ratio) and made two key discoveries.

KW - amorphous silicon

KW - antireflection coatings

KW - chemical barriers

KW - electrical contacts

KW - PV

KW - thin films

KW - transparent conducting oxides (TCO)

KW - X-ray diffraction

M3 - Paper

T2 - 33rd IEEE Photovoltaic Specialists Conference

Y2 - 11 May 2008 through 16 May 2008

ER -

Optimization of Conductivity and Transparency in Amorphous In-Zn-O Transparent Conductors: Preprint

Abstract

Conference

NLR Publication Number

Keywords

Access to Document

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Cite this