Optimum Deposition Conditions for a-(Si,Ge):H Using a Triode-Configured RF Glow Discharge System

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Number of pages6
    StatePublished - 1987
    EventNineteenth IEEE Photovoltaic Specialists Conference-1987 - New Orleans, Louisiana
    Duration: 4 May 19878 May 1987


    ConferenceNineteenth IEEE Photovoltaic Specialists Conference-1987
    CityNew Orleans, Louisiana

    Bibliographical note

    Work performed by Spire Corporation, Bedford, Massachusetts

    NREL Publication Number

    • ACNR/CP-9588

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