Optoelectronic Properties and Plasma Diagnostics of High Deposition Rate a-Si:H Films Using Disilane

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)57-65
    Number of pages9
    JournalSolar Cells
    Issue number1-2
    StatePublished - 1988

    Bibliographical note

    Work performed by Glasstech Solar Inc., Wheat Ridge, Colorado

    NREL Publication Number

    • ACNR/JA-10396

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