Optoelectronic Properties and Plasma Diagnostics of High Deposition Rate a-Si:H Films Using Disilane

Research output: Contribution to journal › Article

Work performed by Glasstech Solar Inc., Wheat Ridge, Colorado

NREL Publication Number

@article{9a6abb163afb46b3b9f31e9b3ce64926,

title = "Optoelectronic Properties and Plasma Diagnostics of High Deposition Rate a-Si:H Films Using Disilane",

author = "NREL",

note = "Work performed by Glasstech Solar Inc., Wheat Ridge, Colorado",

year = "1988",

doi = "10.1016/0379-6787(88)90036-1",

language = "American English",

volume = "24",

pages = "57--65",

journal = "Solar Cells",

issn = "0379-6787",

publisher = "Elsevier BV",

number = "1-2",

}

TY - JOUR

T1 - Optoelectronic Properties and Plasma Diagnostics of High Deposition Rate a-Si:H Films Using Disilane

AU - NREL, null

N1 - Work performed by Glasstech Solar Inc., Wheat Ridge, Colorado

PY - 1988

Y1 - 1988

U2 - 10.1016/0379-6787(88)90036-1

DO - 10.1016/0379-6787(88)90036-1

M3 - Article

SN - 0379-6787

VL - 24

SP - 57

EP - 65

JO - Solar Cells

JF - Solar Cells

IS - 1-2

ER -