Original language | American English |
---|---|
Pages (from-to) | 1009-1012 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 12 |
Issue number | 2 |
DOIs | |
State | Published - 1994 |
NREL Publication Number
- NREL/JA-451-5811