| Original language | American English |
|---|---|
| Pages (from-to) | 1009-1012 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 12 |
| Issue number | 2 |
| DOIs | |
| State | Published - 1994 |
NREL Publication Number
- NREL/JA-451-5811