| Original language | American English |
|---|---|
| Pages (from-to) | Part 2: 1247-1253 |
| Number of pages | 7 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 13 |
| Issue number | 3 |
| DOIs | |
| State | Published - 1995 |
NLR Publication Number
- NREL/JA-412-6842