Particle Accumulation in a Flowing Silane Discharge

    Research output: Contribution to journalArticlepeer-review

    Original languageAmerican English
    Pages (from-to)1546-1553
    Number of pages8
    JournalJournal of Applied Physics
    Issue number4
    StatePublished - 1997

    Bibliographical note

    Work performed by University of Colorado and National Institute of Standards and Technology

    NREL Publication Number

    • NREL/JA-23866

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