Particle Accumulation in a Flowing Silane Discharge

Research output: Contribution to journal › Article › peer-review

Work performed by University of Colorado and National Institute of Standards and Technology

NREL Publication Number

@article{fb86827613e64929a07f9bfa893845b8,

title = "Particle Accumulation in a Flowing Silane Discharge",

author = "NREL",

note = "Work performed by University of Colorado and National Institute of Standards and Technology",

year = "1997",

doi = "10.1063/1.365955",

language = "American English",

volume = "82",

pages = "1546--1553",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "4",

}

TY - JOUR

T1 - Particle Accumulation in a Flowing Silane Discharge

AU - NREL, null

N1 - Work performed by University of Colorado and National Institute of Standards and Technology

PY - 1997

Y1 - 1997

U2 - 10.1063/1.365955

DO - 10.1063/1.365955

M3 - Article

SN - 0021-8979

VL - 82

SP - 1546

EP - 1553

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 4

ER -