Perovskite-Containing Scintillators and Methods of Making the Same

Kelly Schutt (Inventor), Joseph Berry (Inventor)

Research output: Patent

Abstract

An aspect of the present disclosure is a method of making a device, wherein the method includes, in order, depositing a layer of a photoresist onto a substrate, depositing a mask onto the photoresist, developing the photoresist, resulting in the forming of a grid having a plurality of cavities, and depositing a semiconductor onto the grid, resulting in substantially filling each cavity with the semiconductor.
Original languageAmerican English
Patent number12,405,391 B2
Filing date2/09/25
StatePublished - 2025

NREL Publication Number

  • NREL/PT-5K00-96945

Keywords

  • photoresist
  • plurality of cavities
  • semiconductor
  • substrate

Cite this