Abstract
Low temperature oxidation of plasma-synthesized H-terminated Si nanocrystals (NCs) with O2 and H2O was studied using in situ surface infrared and photoluminescence (PL) spectroscopy. Surface SiOH groups were generated only during exposure the Si NCs to H2O, and not O2. The emergence of these surface SiOH groups was accompanied with the appearance of room-temperature PL at ∼1.65 eV. This emission band decreased in intensity, and ultimately disappeared, as these surface SiOH groups were desorbed. Regeneration of surface SiOH through a second H 2O-exposure step led to the reemergence of PL at ∼1.65 eV, suggesting these surface species play a key role in the PL mechanism from Si NCs.
Original language | American English |
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Article number | 050604 |
Number of pages | 5 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 32 |
Issue number | 5 |
DOIs | |
State | Published - Sep 2014 |
NREL Publication Number
- NREL/JA-5J00-63188
Keywords
- photoluminescence
- Si nanocrystals