Abstract
This report describes the marked improvements made of the production line under the PVMaT program: successfully developed a high-speed, all-laser, monolithic integration process for CIGS-based modules on polyimide substrates; exceeded PVMaT goals for scribing rate and total interconnect width; developed robust, well-controlled techniques for selective scribing; improved CIGS evaporation sourcesto allow uniform, controllable delivery; completed foundation required to integrate higher CIGS deposition rates into the production line; developed well-controlled Se delivery system to minimize Se consumption; successfully integrated the parallel-detector spectroscope ellipsometer (PDSE) into a production CIGS deposition chamber; collected useful, in-situ data with PDSE; validated theperformance of the X-ray fluorescometry (XRF) sensor in the production CIGS deposition chamber; and successfully incorporated the XRF sensor into the control architecture of the production CIGS deposition chamber.
Original language | American English |
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Number of pages | 52 |
State | Published - 2002 |
Bibliographical note
Work performed by Global Solar Energy, Tucson, ArizonaNREL Publication Number
- NREL/SR-520-32072
Keywords
- bandgap
- CIGS
- effusion source
- high-rate deposition
- laser scribing process
- PV
- PVMAT
- real-time processing parallel detector spectroscopic ellipsometer (PDSE)
- x-ray florescence (XRF)