| Original language | American English |
|---|---|
| Pages (from-to) | 1-74 |
| Number of pages | 74 |
| Journal | Applied physics communications |
| Volume | 8 |
| Issue number | 1 |
| State | Published - 1988 |
NLR Publication Number
- ACNR/JA-211-10433
Plasma Deposition of Hydrogenated Amorphous Silicon Films
Research output: Contribution to journal › Article