Plasma Deposition of Wide Gap Highly Photoconductive a-Si:H Thin Films from Disilane-Helium Mixtures

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Number of pages8
    StatePublished - 1984
    EventMRS Fall Meeting - Boston, Massachusetts
    Duration: 26 Nov 198430 Nov 1984


    ConferenceMRS Fall Meeting
    CityBoston, Massachusetts

    Bibliographical note

    Work performed by Brookhaven National Laboratory, Department of Applied Science, Upton, New York

    NREL Publication Number

    • ACNR/CP-6694

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