Plasma Deposition of Wide Gap Highly Photoconductive a-Si:H Thin Films from Disilane-Helium Mixtures

Plasma Deposition of Wide Gap Highly Photoconductive a-Si:H Thin Films from Disilane-Helium Mixtures

NREL

Research output: Contribution to conference › Paper

Original language	American English
Pages	393-400
Number of pages	8
State	Published - 1984
Event	MRS Fall Meeting - Boston, Massachusetts Duration: 26 Nov 1984 → 30 Nov 1984

Conference

Conference	MRS Fall Meeting
City	Boston, Massachusetts
Period	26/11/84 → 30/11/84

Bibliographical note

Work performed by Brookhaven National Laboratory, Department of Applied Science, Upton, New York

NLR Publication Number

ACNR/CP-6694

Cite this

@conference{379f19adf3f743f6833f54ebcd6b2775,

title = "Plasma Deposition of Wide Gap Highly Photoconductive a-Si:H Thin Films from Disilane-Helium Mixtures",

author = "NREL",

note = "Work performed by Brookhaven National Laboratory, Department of Applied Science, Upton, New York; MRS Fall Meeting ; Conference date: 26-11-1984 Through 30-11-1984",

year = "1984",

language = "American English",

pages = "393--400",

}