Plasma Enhanced CVD of W and Mo Oxides

    Research output: Contribution to conference › Paper

    Original languageAmerican English
    Pages215-229
    Number of pages15
    StatePublished - 1990
    EventInternational Congress on Optical Science and Engineering - Hamburg, Germany
    Duration: 22 Sep 1988 → 24 Sep 1988

    Conference

    ConferenceInternational Congress on Optical Science and Engineering
    CityHamburg, Germany
    Period22/09/88 → 24/09/88

    NLR Publication Number

    • ACNR/CP-16907

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