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Polycrystalline Silicon: Impurity Incorporation and Passivation
Lawrence L. Kazmerski
Materials Science
Research output
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Contribution to conference
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Paper
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peer-review
6
Scopus Citations
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Dive into the research topics of 'Polycrystalline Silicon: Impurity Incorporation and Passivation'. Together they form a unique fingerprint.
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Chemistry
Chemical Passivation
100%
Silicon
100%
Grain Boundaries
100%
Secondary Ion Mass Spectroscopy
50%
Auger Electron Spectroscopy
50%
Atomic Emission Spectroscopy
50%
Material Science
Silicon
100%
Grain Boundaries
100%
Secondary Ion Mass Spectrometry
50%
Analytical Method
50%
Auger Electron Spectroscopy
50%
Chemical Engineering
Secondary Ion Mass Spectrometry
100%
Polysilicon
100%