| Original language | American English |
|---|---|
| Pages (from-to) | 1584-1587 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 22 |
| Issue number | 3 |
| DOIs | |
| State | Published - 2004 |
NREL Publication Number
- NREL/JA-520-34954