Precipitation of Iron in Silicon

Precipitation of Iron in Silicon

Research output: Contribution to conference › Paper

Original language	American English
Pages	187-190
Number of pages	4
State	Published - 1997
Event	Seventh Workshop on the Role of Impurities and Defects in Silicon Device Processing - Vail, Colorado Duration: 11 Aug 1997 → 13 Aug 1997

Conference

Conference	Seventh Workshop on the Role of Impurities and Defects in Silicon Device Processing
City	Vail, Colorado
Period	11/08/97 → 13/08/97

Bibliographical note

Work performed by University of California at Berkeley, Berkeley, California

NREL Publication Number

NREL/CP-23616

Cite this

@conference{678ecb11569d4910aee202cda44067fe,

title = "Precipitation of Iron in Silicon",

author = "NREL",

note = "Work performed by University of California at Berkeley, Berkeley, California; Seventh Workshop on the Role of Impurities and Defects in Silicon Device Processing ; Conference date: 11-08-1997 Through 13-08-1997",

year = "1997",

language = "American English",

pages = "187--190",

}