Preparation and Characterization of Undoped ZnO TCO Films by Electron-Beam Evaporation and Activated Plasma Deposition Techniques

Research output: Contribution to conference › Paper

Original language	American English
Pages	1452-1456
Number of pages	5
DOIs	https://doi.org/10.1109/pvsc.2009.5411321
State	Published - 2009
Event	34th IEEE Photovoltaic Specialists Conference (PVSC '09) - Philadelphia, Pennsylvania Duration: 7 Jun 2009 → 12 Jun 2009

Conference	34th IEEE Photovoltaic Specialists Conference (PVSC '09)
City	Philadelphia, Pennsylvania
Period	7/06/09 → 12/06/09

NREL Publication Number

@conference{9e845499fbc54a28afcecd8556fac30a,

title = "Preparation and Characterization of Undoped ZnO TCO Films by Electron-Beam Evaporation and Activated Plasma Deposition Techniques",

keywords = "electron beam, plasma deposition",

author = "NREL",

year = "2009",

doi = "10.1109/pvsc.2009.5411321",

language = "American English",

pages = "1452--1456",

note = "34th IEEE Photovoltaic Specialists Conference (PVSC '09) ; Conference date: 07-06-2009 Through 12-06-2009",

}

TY - CONF

T1 - Preparation and Characterization of Undoped ZnO TCO Films by Electron-Beam Evaporation and Activated Plasma Deposition Techniques

AU - NREL, null

PY - 2009

Y1 - 2009

KW - electron beam

KW - plasma deposition

U2 - 10.1109/pvsc.2009.5411321

DO - 10.1109/pvsc.2009.5411321

M3 - Paper

SP - 1452

EP - 1456

T2 - 34th IEEE Photovoltaic Specialists Conference (PVSC '09)

Y2 - 7 June 2009 through 12 June 2009

ER -